Address：Gonghu Community, Xuelang Street, Binhu District, Wuxi City
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The special-purpose vacuum chamber is a vacuum chamber made of a special material, which was developed to reduce the number of vacuum chambers in semiconductor applications, and the wafer capacity is almost unchanged. This configuration employs a moving vacuum with a preset air bearing equipped with a differential pressure vacuum groove. The product features improved static and dynamic response of the machine positioning, pumping time, and reduced settling time.
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Record number: Su ICP No. 19021329